Ultra-high depth resolution SIMS with subkeV grazing beams

P.F.A. Alkemade, Z.X. Jiang, C. Visser, S. Radelaar, W.M. Arnold Bik

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined/Unknown
JournalJournal of Vacuum Science & Technology A-Vacuum Surfaces and Films
Publication statusPublished - 1997

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