Ultra-high depth resolution RBS and SIMS of the modification of a Ge delta in Si during 2 keV O+2 sputtering

W.M. Arnold Bik, Z.X. Jiang, P.F.A. Alkemade, D.O. Boerma

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	540-544
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	136-138
Publication status	Published - 1998

Cite this

@article{8479450d882d4471891434b65b8d8d4d,

title = "Ultra-high depth resolution RBS and SIMS of the modification of a Ge delta in Si during 2 keV O+2 sputtering",

author = "{Arnold Bik}, W.M. and Z.X. Jiang and P.F.A. Alkemade and D.O. Boerma",

year = "1998",

language = "Undefined/Unknown",

volume = "136-138",

pages = "540--544",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier BV",

}

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Ultra-high depth resolution RBS and SIMS of the modification of a Ge delta in Si during 2 keV O+2 sputtering

AU - Arnold Bik, W.M.

AU - Jiang, Z.X.

AU - Alkemade, P.F.A.

AU - Boerma, D.O.

PY - 1998

Y1 - 1998

M3 - Article

SN - 0168-583X

VL - 136-138

SP - 540

EP - 544

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

ER -