Thickness determination of very thin amorphous and microcrystalline silicon layers using reflection/transmission measurements

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Cite this

@article{68bfd0f644e149de930456d9315ae12e,

title = "Thickness determination of very thin amorphous and microcrystalline silicon layers using reflection/transmission measurements",

author = "A. Gordijn and J.K. Rath and R.E.I. Schropp",

year = "2004",

language = "Undefined/Unknown",

volume = "85",

pages = "5096--5098",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

}