The role of hydrogen during plasma beam deposition of amorphous thin films

M.C.M. van de Sanden; R.J. Severens; R.F.G. Meulenbroeks; M.J. de Graaf; Z. Qing; D.K. Otorbaev; R. Engeln; J.W.A.M. Gielen; J.A.M. van der Mullen; D.C. Schram

doi:10.1016/0257-8972(95)08356-1

The role of hydrogen during plasma beam deposition of amorphous thin films

M.C.M. van de Sanden, R.J. Severens, R.F.G. Meulenbroeks, M.J. de Graaf, Z. Qing, D.K. Otorbaev, R. Engeln, J.W.A.M. Gielen, J.A.M. van der Mullen, D.C. Schram

Research output: Contribution to journal › Article › Academic › peer-review

Original language	English
Journal	Surface and Coatings Technology
DOIs	https://doi.org/10.1016/0257-8972(95)08356-1
Publication status	Published - 1995

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10.1016/0257-8972(95)08356-1

Cite this

@article{fbfd248ed0e146368e726e4b834e529a,

title = "The role of hydrogen during plasma beam deposition of amorphous thin films",

author = "{van de Sanden}, M.C.M. and R.J. Severens and R.F.G. Meulenbroeks and {de Graaf}, M.J. and Z. Qing and D.K. Otorbaev and R. Engeln and J.W.A.M. Gielen and {van der Mullen}, J.A.M. and D.C. Schram",

year = "1995",

doi = "10.1016/0257-8972(95)08356-1",

language = "English",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier",

}

TY - JOUR

T1 - The role of hydrogen during plasma beam deposition of amorphous thin films

AU - van de Sanden, M.C.M.

AU - Severens, R.J.

AU - Meulenbroeks, R.F.G.

AU - de Graaf, M.J.

AU - Qing, Z.

AU - Otorbaev, D.K.

AU - Engeln, R.

AU - Gielen, J.W.A.M.

AU - van der Mullen, J.A.M.

AU - Schram, D.C.

PY - 1995

Y1 - 1995

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-0029375564&partnerID=MN8TOARS

U2 - 10.1016/0257-8972(95)08356-1

DO - 10.1016/0257-8972(95)08356-1

M3 - Article

SN - 0257-8972

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -