The influence of the filament temperature on the structure of hot-wire deposited silicon

C.H.M. van der Werf; P.A.T.T. van Veenendaal; M.K. van Veen; A.J. Hardeman; M.Y.S. Rusche; J.K. Rath; R.E.I. Schropp

The influence of the filament temperature on the structure of hot-wire deposited silicon

C.H.M. van der Werf
, P.A.T.T. van Veenendaal
, M.K. van Veen
, A.J. Hardeman
, M.Y.S. Rusche
, J.K. Rath
, R.E.I. Schropp

extern

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	46-49
Number of pages	4
Journal	Thin Solid Films
Volume	430
Issue number	1-2
Publication status	Published - 2003

Cite this

@article{230c3d67efdb4ff99a0b5b1a2e7af934,

title = "The influence of the filament temperature on the structure of hot-wire deposited silicon",

author = "\{van der Werf\}, C.H.M. and \{van Veenendaal\}, P.A.T.T. and \{van Veen\}, M.K. and A.J. Hardeman and M.Y.S. Rusche and J.K. Rath and R.E.I. Schropp",

year = "2003",

language = "Undefined/Unknown",

volume = "430",

pages = "46--49",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier BV",

number = "1-2",

}

TY - JOUR

T1 - The influence of the filament temperature on the structure of hot-wire deposited silicon

AU - van der Werf, C.H.M.

AU - van Veenendaal, P.A.T.T.

AU - van Veen, M.K.

AU - Hardeman, A.J.

AU - Rusche, M.Y.S.

AU - Rath, J.K.

AU - Schropp, R.E.I.

PY - 2003

Y1 - 2003

M3 - Article

SN - 0040-6090

VL - 430

SP - 46

EP - 49

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -