Original language | Undefined/Unknown |
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Pages (from-to) | 46-49 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 430 |
Issue number | 1-2 |
Publication status | Published - 2003 |
The influence of the filament temperature on the structure of hot-wire deposited silicon
C.H.M. van der Werf, P.A.T.T. van Veenendaal, M.K. van Veen, A.J. Hardeman, M.Y.S. Rusche, J.K. Rath, R.E.I. Schropp
Research output: Contribution to journal › Article › Academic › peer-review