The influence of the filament temperature on the structure of hot-wire deposited silicon

C.H.M. van der Werf, P.A.T.T. van Veenendaal, M.K. van Veen, A.J. Hardeman, M.Y.S. Rusche, J.K. Rath, R.E.I. Schropp

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined/Unknown
Pages (from-to)46-49
Number of pages4
JournalThin Solid Films
Volume430
Issue number1-2
Publication statusPublished - 2003

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