The influence of different catalyzers in hot wire CVD for the deposition of polycrystalline silicon thin films

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@article{4328a6fc76d1431a8dc110eb8238fdcd,

title = "The influence of different catalyzers in hot wire CVD for the deposition of polycrystalline silicon thin films",

author = "\{van Veenendaal\}, P.A.T.T. and O.L.J. Gijzeman and J.K. Rath and R.E.I. Schropp",

year = "2001",

language = "Undefined/Unknown",

volume = "395",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier BV",

}