The effects of hot-wire atomic hydrogen on amorphous silicon

A.M. Brockhoff, W. van der Weg, F.H.P.M. Habraken

Research output: Contribution to journal › Article › Academic › peer-review

Cite this

@article{c87de1a5fea44adca684993e9a8d0061,

title = "The effects of hot-wire atomic hydrogen on amorphous silicon",

author = "A.M. Brockhoff and {van der Weg}, W. and F.H.P.M. Habraken",

year = "2001",

language = "Undefined/Unknown",

volume = "89",

pages = "2993--3000",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "5",

}