Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma

M.M. de Jong; A. Mohan; J.K. Rath; R.E.I. Schropp

Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma

M.M. de Jong
, A. Mohan
, J.K. Rath
, R.E.I. Schropp

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined/Unknown
Publication status	Published - 16 May 2011
Event	6th International Conference on the Physics of Dusty Plasmas (ICPDP 11) - Garmisch-Partenkirchen, Germany Duration: 16 May 2011 → 20 May 2011

Conference

Conference	6th International Conference on the Physics of Dusty Plasmas (ICPDP 11)
City	Garmisch-Partenkirchen, Germany
Period	16/05/11 → 20/05/11

Bibliographical note

6th International Conference on the Physics of Dusty Plasmas (ICPDP 11)

Cite this

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title = "Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma",

author = "\{de Jong\}, M.M. and A. Mohan and J.K. Rath and R.E.I. Schropp",

note = "6th International Conference on the Physics of Dusty Plasmas (ICPDP 11); 6th International Conference on the Physics of Dusty Plasmas (ICPDP 11) ; Conference date: 16-05-2011 Through 20-05-2011",

year = "2011",

month = may,

day = "16",

language = "Undefined/Unknown",

}

TY - CONF

T1 - Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma

AU - de Jong, M.M.

AU - Mohan, A.

AU - Rath, J.K.

AU - Schropp, R.E.I.

N1 - 6th International Conference on the Physics of Dusty Plasmas (ICPDP 11)

PY - 2011/5/16

Y1 - 2011/5/16

M3 - Poster

T2 - 6th International Conference on the Physics of Dusty Plasmas (ICPDP 11)

Y2 - 16 May 2011 through 20 May 2011

ER -