Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma

M.M. de Jong; A. Mohan; J.K. Rath; R.E.I. Schropp

doi:10.1063/1.3659868

Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma

M.M. de Jong, A. Mohan, J.K. Rath, R.E.I. Schropp

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Using an energy resolved mass spectrometer we measured the ion energy and abundance of SinH2n+1+(n = 1…5) ions reaching the growing surface as a function of temperature and pressure in a very high frequency (VHF) hydrogen diluted silane plasma. We observed an increase in ion energy with increasing substrate temperature for all species. For low mass ions, we observe an increase in the number of ions reaching the growing surface with increasing temperature, whereas the count rate for high mass ions decreases with increasing temperature. This result confirms the hypothesis that a higher substrate temperature will prevent the plasma from going into the dusty γ′‐regime by suppressing the polymerization reactions of silyl into larger polysilanes which are the precursors for the dust formation.

Original language	English
Title of host publication	Dusty/Complex Plasmas: Basic and Interdisciplinary Research: Sixth International Conference on the Physics of Dusty Plasmas
Editors	Padma K. Shukla, Hubertus M. Thomas, Markus H. Thoma, Vladimir Yu32 Nosenko
Place of Publication	Melville, N.Y.
Publisher	American Institute of Physics
Pages	411-412
Number of pages	2
DOIs	https://doi.org/10.1063/1.3659868
Publication status	Published - 16 May 2011

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Sixth International Conference on the Physics of Dusty Plasmas

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10.1063/1.3659868

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de Jong, M. M., Mohan, A., Rath, J. K., & Schropp, R. E. I. (2011). Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma. In P. K. Shukla, H. M. Thomas, M. H. Thoma, & V. Y. Nosenko (Eds.), Dusty/Complex Plasmas: Basic and Interdisciplinary Research: Sixth International Conference on the Physics of Dusty Plasmas (pp. 411-412). American Institute of Physics. https://doi.org/10.1063/1.3659868

de Jong, M.M. ; Mohan, A. ; Rath, J.K. et al. / Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma. Dusty/Complex Plasmas: Basic and Interdisciplinary Research: Sixth International Conference on the Physics of Dusty Plasmas. editor / Padma K. Shukla ; Hubertus M. Thomas ; Markus H. Thoma ; Vladimir Yu32 Nosenko. Melville, N.Y. : American Institute of Physics, 2011. pp. 411-412

@inproceedings{22aae1193a254aebb12eeb6188cb1cee,

title = "Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma",

abstract = "Using an energy resolved mass spectrometer we measured the ion energy and abundance of SinH2n+1+(n = 1…5) ions reaching the growing surface as a function of temperature and pressure in a very high frequency (VHF) hydrogen diluted silane plasma. We observed an increase in ion energy with increasing substrate temperature for all species. For low mass ions, we observe an increase in the number of ions reaching the growing surface with increasing temperature, whereas the count rate for high mass ions decreases with increasing temperature. This result confirms the hypothesis that a higher substrate temperature will prevent the plasma from going into the dusty γ′‐regime by suppressing the polymerization reactions of silyl into larger polysilanes which are the precursors for the dust formation.",

author = "{de Jong}, M.M. and A. Mohan and J.K. Rath and R.E.I. Schropp",

note = "Sixth International Conference on the Physics of Dusty Plasmas",

year = "2011",

month = may,

day = "16",

doi = "10.1063/1.3659868",

language = "English",

pages = "411--412",

editor = "Shukla, {Padma K.} and Thomas, {Hubertus M.} and Thoma, {Markus H.} and Nosenko, {Vladimir Yu32}",

booktitle = "Dusty/Complex Plasmas: Basic and Interdisciplinary Research: Sixth International Conference on the Physics of Dusty Plasmas",

publisher = "American Institute of Physics",

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de Jong, MM, Mohan, A, Rath, JK & Schropp, REI 2011, Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma. in PK Shukla, HM Thomas, MH Thoma & VY Nosenko (eds), Dusty/Complex Plasmas: Basic and Interdisciplinary Research: Sixth International Conference on the Physics of Dusty Plasmas. American Institute of Physics, Melville, N.Y., pp. 411-412. https://doi.org/10.1063/1.3659868

Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma. / de Jong, M.M.; Mohan, A.; Rath, J.K. et al.
Dusty/Complex Plasmas: Basic and Interdisciplinary Research: Sixth International Conference on the Physics of Dusty Plasmas. ed. / Padma K. Shukla; Hubertus M. Thomas; Markus H. Thoma; Vladimir Yu32 Nosenko. Melville, N.Y.: American Institute of Physics, 2011. p. 411-412.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma

AU - de Jong, M.M.

AU - Mohan, A.

AU - Rath, J.K.

AU - Schropp, R.E.I.

N1 - Sixth International Conference on the Physics of Dusty Plasmas

PY - 2011/5/16

Y1 - 2011/5/16

N2 - Using an energy resolved mass spectrometer we measured the ion energy and abundance of SinH2n+1+(n = 1…5) ions reaching the growing surface as a function of temperature and pressure in a very high frequency (VHF) hydrogen diluted silane plasma. We observed an increase in ion energy with increasing substrate temperature for all species. For low mass ions, we observe an increase in the number of ions reaching the growing surface with increasing temperature, whereas the count rate for high mass ions decreases with increasing temperature. This result confirms the hypothesis that a higher substrate temperature will prevent the plasma from going into the dusty γ′‐regime by suppressing the polymerization reactions of silyl into larger polysilanes which are the precursors for the dust formation.

AB - Using an energy resolved mass spectrometer we measured the ion energy and abundance of SinH2n+1+(n = 1…5) ions reaching the growing surface as a function of temperature and pressure in a very high frequency (VHF) hydrogen diluted silane plasma. We observed an increase in ion energy with increasing substrate temperature for all species. For low mass ions, we observe an increase in the number of ions reaching the growing surface with increasing temperature, whereas the count rate for high mass ions decreases with increasing temperature. This result confirms the hypothesis that a higher substrate temperature will prevent the plasma from going into the dusty γ′‐regime by suppressing the polymerization reactions of silyl into larger polysilanes which are the precursors for the dust formation.

U2 - 10.1063/1.3659868

DO - 10.1063/1.3659868

M3 - Conference contribution

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BT - Dusty/Complex Plasmas: Basic and Interdisciplinary Research: Sixth International Conference on the Physics of Dusty Plasmas

A2 - Shukla, Padma K.

A2 - Thomas, Hubertus M.

A2 - Thoma, Markus H.

A2 - Nosenko, Vladimir Yu32

PB - American Institute of Physics

CY - Melville, N.Y.

ER -

de Jong MM, Mohan A, Rath JK, Schropp REI. Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma. In Shukla PK, Thomas HM, Thoma MH, Nosenko VY, editors, Dusty/Complex Plasmas: Basic and Interdisciplinary Research: Sixth International Conference on the Physics of Dusty Plasmas. Melville, N.Y.: American Institute of Physics. 2011. p. 411-412 doi: 10.1063/1.3659868

Temperature Dependence of the Ion Energy Distribution in a Hydrogen Diluted Silane VHF Plasma

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