Synthesis of poly(meta-diethynyl benzene) with initiated chemical vapour deposition

R. Bakker, P. Weijers, D.A. Spee, M.J. van Steenbergen, C.H.M. van der Werf, J.K. Rath, R.E.I. Schropp

Research output: Contribution to journalArticleAcademicpeer-review

Abstract

In this work, polymerization of meta-diethynyl benzene (MDEB) using iCVD is reported, which opens possibilities for use of polymers as a dielectric insulator in electronic applications that cannot be combined with solvent-based materials. iCVD is a solvent free production method, allowing the deposition of PMDEB layers at a rate of 12 nm/min. The polymers produced have a high molecular weight with a broad distribution (1000 to more than 25,000 g/mole) and a clearly defined Fourier transform infrared spectrum. The presence of a small peak at 2105 cm−1 and a monomer peak in the gel permeation chromatogram (GPC) suggest that that some monomer is incorporated in the layers.
Original languageEnglish
Pages (from-to)4418-4420
Number of pages3
JournalThin Solid Films
Volume519
Issue number14
DOIs
Publication statusPublished - 2011

Keywords

  • Farmacie/Biofarmaceutische wetenschappen (FARM)
  • Medical technology
  • Farmacie(FARM)
  • Biomedische technologie en medicijnen
  • Pharmacology

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