Abstract
In this work, polymerization of meta-diethynyl benzene (MDEB) using iCVD is reported, which opens possibilities for use of polymers as a dielectric insulator in electronic applications that cannot be combined with solvent-based materials. iCVD is a solvent free production method, allowing the deposition of PMDEB layers at a rate of 12 nm/min. The polymers produced have a high molecular weight with a broad distribution (1000 to more than 25,000 g/mole) and a clearly defined Fourier transform infrared spectrum. The presence of a small peak at 2105 cm−1 and a monomer peak in the gel permeation chromatogram (GPC) suggest that that some monomer is incorporated in the layers.
Original language | English |
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Pages (from-to) | 4418-4420 |
Number of pages | 3 |
Journal | Thin Solid Films |
Volume | 519 |
Issue number | 14 |
DOIs | |
Publication status | Published - 2011 |
Keywords
- Farmacie/Biofarmaceutische wetenschappen (FARM)
- Medical technology
- Farmacie(FARM)
- Biomedische technologie en medicijnen
- Pharmacology