| Original language | Undefined/Unknown |
|---|---|
| Qualification | Doctor of Philosophy |
| Awarding Institution |
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| Supervisors/Advisors |
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| Publication status | Published - 1998 |
Surface passivation of silicon by PECVD silicon nitride
F.M. Schuurmans
Research output: Thesis › Doctoral thesis 2 (Research NOT UU / Graduation UU)