Surface passivation of silicon by PECVD silicon nitride

F.M. Schuurmans

Research output: ThesisDoctoral thesis 2 (Research NOT UU / Graduation UU)

Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Utrecht University
Supervisors/Advisors
  • Sinke, W.C., Primary supervisor
Publication statusPublished - 1998

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