Study of the influence of oxygen on the composition of thin films obtained by r.f. sputtering from a Ca5(PO4)3OH target

K. van Dijk, J. Verhoeven, C.H.M. Marée, F.H.P.M. Habraken, J.A. Jansen

Research output: Contribution to journal › Article › Academic › peer-review

Cite this

@article{99bb9f4e20db4a43b39cd17dc35786be,

title = "Study of the influence of oxygen on the composition of thin films obtained by r.f. sputtering from a Ca5(PO4)3OH target",

author = "{van Dijk}, K. and J. Verhoeven and C.H.M. Mar{\'e}e and F.H.P.M. Habraken and J.A. Jansen",

year = "1997",

language = "Undefined/Unknown",

volume = "304",

pages = "191",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier BV",

}