| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 631-635 |
| Number of pages | 5 |
| Journal | Thin Solid Films |
| Volume | 515 |
| Publication status | Published - 2006 |
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Study of the gas rarefaction phenomenon in a magnetron sputtering system
- A. Palmero Acebedo
- , H. Rudolph
- , F.H.P.M. Habraken
Research output: Contribution to journal › Meeting Abstract › Other research output