Study of the gas rarefaction phenomenon in a magnetron sputtering system

A. Palmero Acebedo, H. Rudolph, F.H.P.M. Habraken

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@article{f9552ccc80b045ceabdcacee7efe4563,

title = "Study of the gas rarefaction phenomenon in a magnetron sputtering system",

author = "{Palmero Acebedo}, A. and H. Rudolph and F.H.P.M. Habraken",

year = "2006",

language = "Undefined/Unknown",

volume = "515",

pages = "631--635",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}