Study of the a-Siya-Sio interface deposition by r.f. magnetron sputtering

Research output: Contribution to conference › Paper › Other research output

Original language	Undefined/Unknown
Publication status	Published - 1 May 2003
Event	Intern. Conf. on Metallurgical coating and thin films - San Diego, USA Duration: 1 May 2003 → …

Conference	Intern. Conf. on Metallurgical coating and thin films
City	San Diego, USA
Period	1/05/03 → …

Intern. Conf. on Metallurgical coating and thin films

Cite this

@conference{c332c93e346a47bab83f30415963cd92,

title = "Study of the a-Siya-Sio interface deposition by r.f. magnetron sputtering",

author = "N. Tomozeiu and \{van Faassen\}, E.E.H. and \{Palmero Acebedo\}, A. and W.M. Arnoldbik and A.M. Vredenberg and F.H.P.M. Habraken",

note = "Intern. Conf. on Metallurgical coating and thin films; Intern. Conf. on Metallurgical coating and thin films ; Conference date: 01-05-2003",

year = "2003",

month = may,

day = "1",

language = "Undefined/Unknown",

}

TY - CONF

T1 - Study of the a-Siya-Sio interface deposition by r.f. magnetron sputtering

AU - Tomozeiu, N.

AU - van Faassen, E.E.H.

AU - Palmero Acebedo, A.

AU - Arnoldbik, W.M.

AU - Vredenberg, A.M.

AU - Habraken, F.H.P.M.

N1 - Intern. Conf. on Metallurgical coating and thin films

PY - 2003/5/1

Y1 - 2003/5/1

M3 - Paper

T2 - Intern. Conf. on Metallurgical coating and thin films

Y2 - 1 May 2003

ER -