Study of permeability of thin films of a-Si:H using MeV ion beams

A.M. Brockhoff, W.M. Arnold Bik, F.H.P.M. Habraken

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	226-230
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	190
Publication status	Published - 2002

Cite this

@article{61f4bee1c0f14554ac60a5b5af82bd77,

title = "Study of permeability of thin films of a-Si:H using MeV ion beams",

author = "A.M. Brockhoff and {Arnold Bik}, W.M. and F.H.P.M. Habraken",

year = "2002",

language = "Undefined/Unknown",

volume = "190",

pages = "226--230",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

}

TY - JOUR

T1 - Study of permeability of thin films of a-Si:H using MeV ion beams

AU - Brockhoff, A.M.

AU - Arnold Bik, W.M.

AU - Habraken, F.H.P.M.

PY - 2002

Y1 - 2002

M3 - Article

SN - 0168-583X

VL - 190

SP - 226

EP - 230

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

ER -