| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 382-385 |
| Number of pages | 4 |
| Journal | Thin Solid Films |
| Volume | 420 |
| Publication status | Published - 2002 |
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Structure of sputtered silicon suboxide single- and multilayers
- N. Tomozeiu
- , E.E.H. van Faassen
- , W.M. Arnold Bik
- , A.M. Vredenberg
- , F.H.P.M. Habraken
- extern
Research output: Contribution to journal › Article › Academic › peer-review