Structure of sputtered silicon suboxide single- and multilayers

N. Tomozeiu, E.E.H. van Faassen, W.M. Arnold Bik, A.M. Vredenberg, F.H.P.M. Habraken

Research output: Contribution to journal › Article › Academic › peer-review

Cite this

@article{be0eafe91c7c4dbdb30b5d171435f2f6,

title = "Structure of sputtered silicon suboxide single- and multilayers",

author = "N. Tomozeiu and {van Faassen}, E.E.H. and {Arnold Bik}, W.M. and A.M. Vredenberg and F.H.P.M. Habraken",

year = "2002",

language = "Undefined/Unknown",

volume = "420",

pages = "382--385",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}