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Structural properties of a-SiOx layers deposited by reactive sputtering technique

  • N. Tomozeiu
  • , J.J. van Hapert
  • , E.E.H. van Faassen
  • , W.M. Arnold Bik
  • , A.M. Vredenberg
  • , F.H.P.M. Habraken

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined/Unknown
Pages (from-to)513-521
Number of pages9
Journalj. optoel. adv. mat
Volume4
Issue number3
Publication statusPublished - 2002

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