Structural properties of a-Si:H related to ion energy distributions in VHF silane deposition plasmas

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	205-216
Number of pages	12
Journal	Journal of Non-Crystalline Solids
Volume	226
Publication status	Published - 1998

Cite this

@article{755c0f72091c4285967b775204e45327,

title = "Structural properties of a-Si:H related to ion energy distributions in VHF silane deposition plasmas",

author = "E.A.G. Hamers and \{van Sark\}, W.G.J.H.M. and J. Bezemer and H. Meiling and \{van der Weg\}, W.",

year = "1998",

language = "Undefined/Unknown",

volume = "226",

pages = "205--216",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Structural properties of a-Si:H related to ion energy distributions in VHF silane deposition plasmas

AU - Hamers, E.A.G.

AU - van Sark, W.G.J.H.M.

AU - Bezemer, J.

AU - Meiling, H.

AU - van der Weg, W.

PY - 1998

Y1 - 1998

M3 - Article

SN - 0022-3093

VL - 226

SP - 205

EP - 216

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

ER -