silicon nitride at high deposition rate by hot-wire chemical vapour deposition as passivating andantirefelection layer on multicrystalline silicon solar cells

C.H.M. van der Werf; H.D. Goldbach; J. Loffler; a. Scarfo; A.M.C. Kylner; B. Stannowski; W.M. Arnoldbik; A.W. Weeber; H. Rieffe; B.J. Soppe; J.K. Rath; R.E.I. Schropp

silicon nitride at high deposition rate by hot-wire chemical vapour deposition as passivating andantirefelection layer on multicrystalline silicon solar cells

C.H.M. van der Werf, H.D. Goldbach, J. Loffler, a. Scarfo, A.M.C. Kylner, B. Stannowski, W.M. Arnoldbik, A.W. Weeber, H. Rieffe, B.J. Soppe, J.K. Rath, R.E.I. Schropp

extern

Research output: Contribution to journal › Meeting Abstract › Other research output

Original language	Undefined/Unknown
Pages (from-to)	51-54
Number of pages	4
Journal	Thin Solid Films
Volume	501
Publication status	Published - 2006

Cite this

van der Werf, C. H. M., Goldbach, H. D., Loffler, J., Scarfo, A., Kylner, A. M. C., Stannowski, B., Arnoldbik, W. M., Weeber, A. W., Rieffe, H., Soppe, B. J., Rath, J. K., & Schropp, R. E. I. (2006). silicon nitride at high deposition rate by hot-wire chemical vapour deposition as passivating andantirefelection layer on multicrystalline silicon solar cells. Thin Solid Films, 501, 51-54.

@article{466c5876ce254efd97c9add5babda561,

title = "silicon nitride at high deposition rate by hot-wire chemical vapour deposition as passivating andantirefelection layer on multicrystalline silicon solar cells",

author = "{van der Werf}, C.H.M. and H.D. Goldbach and J. Loffler and a. Scarfo and A.M.C. Kylner and B. Stannowski and W.M. Arnoldbik and A.W. Weeber and H. Rieffe and B.J. Soppe and J.K. Rath and R.E.I. Schropp",

year = "2006",

language = "Undefined/Unknown",

volume = "501",

pages = "51--54",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - silicon nitride at high deposition rate by hot-wire chemical vapour deposition as passivating andantirefelection layer on multicrystalline silicon solar cells

AU - van der Werf, C.H.M.

AU - Goldbach, H.D.

AU - Loffler, J.

AU - Scarfo, a.

AU - Kylner, A.M.C.

AU - Stannowski, B.

AU - Arnoldbik, W.M.

AU - Weeber, A.W.

AU - Rieffe, H.

AU - Soppe, B.J.

AU - Rath, J.K.

AU - Schropp, R.E.I.

PY - 2006

Y1 - 2006

M3 - Meeting Abstract

SN - 0040-6090

VL - 501

SP - 51

EP - 54

JO - Thin Solid Films

JF - Thin Solid Films

ER -