Silicon-containing copolymers of MMA tested for a positive-tone high resolution bi-layer e-beam resist system

J.G. Maessen; S. van den Boogaart; E.J.K. Verstegen; J.G. Kloosterboer; F.C.M.J.M. van Delft; W. Catsburg; F.H.P.M. Habraken

Silicon-containing copolymers of MMA tested for a positive-tone high resolution bi-layer e-beam resist system

J.G. Maessen, S. van den Boogaart, E.J.K. Verstegen, J.G. Kloosterboer, F.C.M.J.M. van Delft, W. Catsburg, F.H.P.M. Habraken

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Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	540-545
Number of pages	6
Journal	Microelectronic Engineering
Volume	78-79
Publication status	Published - 2005

Cite this

@article{b9842ff83cf34972b7c59f3366fefec9,

title = "Silicon-containing copolymers of MMA tested for a positive-tone high resolution bi-layer e-beam resist system",

author = "J.G. Maessen and {van den Boogaart}, S. and E.J.K. Verstegen and J.G. Kloosterboer and {van Delft}, F.C.M.J.M. and W. Catsburg and F.H.P.M. Habraken",

year = "2005",

language = "Undefined/Unknown",

volume = "78-79",

pages = "540--545",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Silicon-containing copolymers of MMA tested for a positive-tone high resolution bi-layer e-beam resist system

AU - Maessen, J.G.

AU - van den Boogaart, S.

AU - Verstegen, E.J.K.

AU - Kloosterboer, J.G.

AU - van Delft, F.C.M.J.M.

AU - Catsburg, W.

AU - Habraken, F.H.P.M.

PY - 2005

Y1 - 2005

M3 - Article

SN - 0167-9317

VL - 78-79

SP - 540

EP - 545

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -