Abstract
Submicron single-shot ablation features produced by femtosecond laser pulses was investigated in silicon-on insulator with atomic force microscopy. The results are fitted with a model that includes secondary absorption in the laser-induced plasma.
| Original language | English |
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| Pages | JT2A.46 |
| Number of pages | 1 |
| Publication status | Published - 12 Mar 2012 |
| Event | High Intensity Lasers and High Field Phenomena (HILAS) 2012 - Duration: 12 Mar 2012 → … |
Conference
| Conference | High Intensity Lasers and High Field Phenomena (HILAS) 2012 |
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| Period | 12/03/12 → … |