RF Reactive magnetron sputter deposition of silicon sub-oxides

E.D. van Hattum

Research output: Thesis › Doctoral thesis 1 (Research UU / Graduation UU)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Utrecht University
Supervisors/Advisors
  • Habraken, F.H.P.M., Primary supervisor
  • Rudolph, H., Supervisor
  • Arnold Bik, W.M., Co-supervisor, External person
Publication statusPublished - 2007

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