@conference{b1a4d86c3337442a8086836e047c1b3a,
title = "Relation between magnetron plasma deposition conditions and the structure of SiOx films",
author = "\{van Hattum\}, E.D. and \{Palmero Acebedo\}, A. and W.M. Arnoldbik and A.M. Vredenberg and F.H.P.M. Habraken",
note = "Workshop in the exploration of low temperature plasma physics, Rolduc; Workshop in the exploration of low temperature plasma physics, Rolduc ; Conference date: 27-11-2003 Through 28-11-2003",
year = "2003",
month = nov,
day = "27",
language = "Undefined/Unknown",
}