Relation between magnetron plasma deposition conditions and the structure of SiOx films

E.D. van Hattum, A. Palmero Acebedo, W.M. Arnoldbik, A.M. Vredenberg, F.H.P.M. Habraken

Research output: Contribution to conferencePaperOther research output

Original languageUndefined/Unknown
Publication statusPublished - 27 Nov 2003
EventWorkshop in the exploration of low temperature plasma physics, Rolduc - Kerkrade
Duration: 27 Nov 200328 Nov 2003

Conference

ConferenceWorkshop in the exploration of low temperature plasma physics, Rolduc
CityKerkrade
Period27/11/0328/11/03

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