Protocrystalline Silicon at High Rate from Undiluted Silane

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Original language	Undefined/Unknown
Pages (from-to)	A8.4.1
Number of pages	1
Journal	Materials Research Society symposia proceedings
Volume	808
Issue number	204
Publication status	Published - 2004

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@article{a38799385552416eb5e8feb35b4c3648,

title = "Protocrystalline Silicon at High Rate from Undiluted Silane",

author = "R.E.I. Schropp and \{van Veen\}, M.K. and \{van der Werf\}, C.H.M. and D.L. Williamson and A.H. Mahan",

year = "2004",

language = "Undefined/Unknown",

volume = "808",

pages = "A8.4.1",

journal = "Materials Research Society symposia proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

number = "204",

}

TY - JOUR

T1 - Protocrystalline Silicon at High Rate from Undiluted Silane

AU - Schropp, R.E.I.

AU - van Veen, M.K.

AU - van der Werf, C.H.M.

AU - Williamson, D.L.

AU - Mahan, A.H.

PY - 2004

Y1 - 2004

M3 - Article

SN - 0272-9172

VL - 808

SP - A8.4.1

JO - Materials Research Society symposia proceedings

JF - Materials Research Society symposia proceedings

IS - 204

ER -