Processes in Silicon Deposition by Hot-Wire Chemical Vapor Deposition

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Original language	Undefined/Unknown
Pages (from-to)	465-470
Number of pages	6
Journal	Current opinion in solid state & materials science
Volume	6/5
Publication status	Published - 2002

Cite this

@article{0d50f99ee2b54d9bbe385a24060d3bfe,

title = "Processes in Silicon Deposition by Hot-Wire Chemical Vapor Deposition",

author = "{van Veenendaal}, P.A.T.T. and R.E.I. Schropp",

year = "2002",

language = "Undefined/Unknown",

volume = "6/5",

pages = "465--470",

journal = "Current opinion in solid state & materials science",

issn = "1359-0286",

publisher = "Elsevier Ltd",

}