Probing Periodic Oscillations in a Silane Dusty Plasma in VHF PECVD Process

A Akshatha Mohan; C. van der Wel; R.E.I. Schropp; J.K. Rath

doi:10.1139/cjp-2013-0611

Probing Periodic Oscillations in a Silane Dusty Plasma in VHF PECVD Process

A Akshatha Mohan, C. van der Wel, R.E.I. Schropp, J.K. Rath

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Research output: Contribution to journal › Article › Academic › peer-review

Abstract

In order to estimate the dust formation time scale in a silane-hydrogen plasma, optical and electrical plasma diagnostics are performed. We report a periodic fluctuation in emission intensity and electric current in a dusty plasma. The trends of the frequency of fluctuations with varying substrate temperatures and gas flows are studied. However no such fluctuation is observed in the non-dusty plasma. It is hypothesed that this fluctuation arises from the periodic formation and ejection of a dust cloud via the void formation when a critical dust size is reached.

Original language	English
Journal	Canadian Journal of Physics
DOIs	https://doi.org/10.1139/cjp-2013-0611
Publication status	Published - 2013

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title = "Probing Periodic Oscillations in a Silane Dusty Plasma in VHF PECVD Process",

abstract = "In order to estimate the dust formation time scale in a silane-hydrogen plasma, optical and electrical plasma diagnostics are performed. We report a periodic fluctuation in emission intensity and electric current in a dusty plasma. The trends of the frequency of fluctuations with varying substrate temperatures and gas flows are studied. However no such fluctuation is observed in the non-dusty plasma. It is hypothesed that this fluctuation arises from the periodic formation and ejection of a dust cloud via the void formation when a critical dust size is reached.",

author = "{Akshatha Mohan}, A and {van der Wel}, C. and R.E.I. Schropp and J.K. Rath",

year = "2013",

doi = "10.1139/cjp-2013-0611",

language = "English",

journal = "Canadian Journal of Physics",

issn = "0008-4204",

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AU - Akshatha Mohan, A

AU - van der Wel, C.

AU - Schropp, R.E.I.

AU - Rath, J.K.

PY - 2013

Y1 - 2013

N2 - In order to estimate the dust formation time scale in a silane-hydrogen plasma, optical and electrical plasma diagnostics are performed. We report a periodic fluctuation in emission intensity and electric current in a dusty plasma. The trends of the frequency of fluctuations with varying substrate temperatures and gas flows are studied. However no such fluctuation is observed in the non-dusty plasma. It is hypothesed that this fluctuation arises from the periodic formation and ejection of a dust cloud via the void formation when a critical dust size is reached.

AB - In order to estimate the dust formation time scale in a silane-hydrogen plasma, optical and electrical plasma diagnostics are performed. We report a periodic fluctuation in emission intensity and electric current in a dusty plasma. The trends of the frequency of fluctuations with varying substrate temperatures and gas flows are studied. However no such fluctuation is observed in the non-dusty plasma. It is hypothesed that this fluctuation arises from the periodic formation and ejection of a dust cloud via the void formation when a critical dust size is reached.

U2 - 10.1139/cjp-2013-0611

DO - 10.1139/cjp-2013-0611

M3 - Article

SN - 0008-4204

JO - Canadian Journal of Physics

JF - Canadian Journal of Physics

ER -

Probing Periodic Oscillations in a Silane Dusty Plasma in VHF PECVD Process

Abstract

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