On the deposition process of silicon suboxides by a RF magnetron reactive sputtering in Ar-O2 mixtures: theoretical and experimental approach

A. Palmero Acebedo, N. Tomozeiu, A.M. Vredenberg, W.M. Arnoldbik, F.H.P.M. Habraken

Research output: Contribution to journalArticleAcademicpeer-review

Original languageEnglish
Pages (from-to)214-221
Number of pages8
JournalSurface & coatings technology
Publication statusPublished - 2004

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