On-line characterisation of radiofrequency magnetron sputter deposition of SiOx using elastic recoil detection

E.D. van Hattum, W.M. Arnoldbik, A. Palmero Acebedo, F.H.P.M. Habraken

Research output: Contribution to journalMeeting AbstractOther research output

Original languageUndefined/Unknown
Pages (from-to)13-17
Number of pages5
JournalThin Solid Films
Volume494
Publication statusPublished - 2006

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