Microwave mobility in profiled poly-Si thin films deposited on glass by Hot Wire CVD

P.A.T.T. van Veenendaal, T.J. Savenije, J.K. Rath, R.E.I. Schropp

Research output: Contribution to journal › Article › Academic › peer-review

Cite this

@article{6ed77a80e9164754b90ce4e7164dc119,

title = "Microwave mobility in profiled poly-Si thin films deposited on glass by Hot Wire CVD",

author = "{van Veenendaal}, P.A.T.T. and T.J. Savenije and J.K. Rath and R.E.I. Schropp",

year = "2002",

language = "Undefined/Unknown",

volume = "403-404",

pages = "175--178",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier BV",

}