Microstructure modifications induced by bonded hydrogen in N-rich SiNx:H films

E.C. Paloura, Ch. Lioutas, N. Vouroutzis, W.M. Arnold Bik, F.H.P.M. Habraken, Y. Kuo

Research output: Contribution to journal › Article › Academic › peer-review

Cite this

@article{ee839d9d2c974eb0972e0b7af8c2f611,

title = "Microstructure modifications induced by bonded hydrogen in N-rich SiNx:H films",

author = "E.C. Paloura and Ch. Lioutas and N. Vouroutzis and \{Arnold Bik\}, W.M. and F.H.P.M. Habraken and Y. Kuo",

year = "1996",

language = "Undefined/Unknown",

volume = "80",

pages = "10",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

}