Methods of Deposition of Hydrogenated Amorphous Silicon for Device Applications

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

Original language	Undefined/Unknown
Title of host publication	Advances in Plasma-Grown Hydrogenated Films
Editors	M.H. Francombe
Place of Publication	San Diego, USA
Publisher	Academic Press
Pages	1-215
Number of pages	215
DOIs	https://doi.org/10.1016/B978-012512908-4/50004-7
Publication status	Published - 2002

Access to Document

@inbook{f5e51a4d668e43169a39702ef9dfada9,

title = "Methods of Deposition of Hydrogenated Amorphous Silicon for Device Applications",

author = "{van Sark}, W.G.J.H.M.",

year = "2002",

doi = "10.1016/B978-012512908-4/50004-7",

language = "Undefined/Unknown",

publisher = "Academic Press",

pages = "1--215",

editor = "M.H. Francombe",

booktitle = "Advances in Plasma-Grown Hydrogenated Films",

address = "United States",

}