Low-temperature deposition of polycrystalline silicon thin films by hot-wire CVD

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	269
Number of pages	1
Journal	Solar Energy Materials and Solar Cells
Volume	48
Publication status	Published - 1997

Cite this

@article{7673ec2c9321415eb4458e2dce2b3bfa,

title = "Low-temperature deposition of polycrystalline silicon thin films by hot-wire CVD",

author = "J.K. Rath and H. Meiling and R.E.I. Schropp",

year = "1997",

language = "Undefined/Unknown",

volume = "48",

pages = "269",

journal = "Solar Energy Materials and Solar Cells",

issn = "0927-0248",

publisher = "Elsevier BV",

}