Ion bombardment in silane VHF deposition plasmas

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	603-608
Number of pages	6
Journal	Materials Research Society symposia proceedings
Volume	467
Publication status	Published - 1997

Cite this

@article{38505ac5a099420db5723d2ca52077fc,

title = "Ion bombardment in silane VHF deposition plasmas",

author = "E.A.G. Hamers and J. Bezemer and H. Meiling and {van Sark}, W.G.J.H.M. and {van der Weg}, W.",

year = "1997",

language = "Undefined/Unknown",

volume = "467",

pages = "603--608",

journal = "Materials Research Society symposia proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

}