Ion beam-induced anisotropic plastic deformation of silicon microstructures

T. van Dillen, M.J.A. de Dood, J.J. Penninkhof, A. Polman, S. Roorda, A.M. Vredenberg

Research output: Contribution to journal › Article › Academic › peer-review

Cite this

@article{93945f862fd344d4a37f884ff38435a3,

title = "Ion beam-induced anisotropic plastic deformation of silicon microstructures",

author = "\{van Dillen\}, T. and \{de Dood\}, M.J.A. and J.J. Penninkhof and A. Polman and S. Roorda and A.M. Vredenberg",

year = "2004",

language = "Undefined/Unknown",

volume = "84",

pages = "3591--3593",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "18",

}