Ion beam iduced desorption from thin films: SiO2 single layers and SiO2/Si multilayers

A. Bik, W.M. Tomozeiu, F.H.P.M. Habraken

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined/Unknown
Pages (from-to)433-438
Number of pages6
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Publication statusPublished - 2002

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