Abstract
We present the monolithic integration of deep-submicrometer complementary metal-oxide-semiconductor (CMOS) microchips with a-Si:H solar cells. Solar cells are manufactured directly on the CMOS chips. The microchips maintain comparable electronic performance, and the solar cells show efficiency values above 7%. The yield of photovoltaic cells on planarized CMOS chips is 92%. This integration allows integrated energy harvesting using established process technologies and, as such, is an important step toward wireless autonomous microsystems (i.e., “smart dust”).
Original language | English |
---|---|
Pages (from-to) | 2014-2021 |
Number of pages | 8 |
Journal | IEEE Transactions on Electron Devices |
Volume | 58 |
Issue number | 7 |
Publication status | Published - 2011 |