Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

J. Lu, A.Y. Kovalgin, C.H.M. van der Werf, R.E.I. Schropp, J. Schmitz

Research output: Contribution to journalArticleAcademicpeer-review

Abstract

We present the monolithic integration of deep-submicrometer complementary metal-oxide-semiconductor (CMOS) microchips with a-Si:H solar cells. Solar cells are manufactured directly on the CMOS chips. The microchips maintain comparable electronic performance, and the solar cells show efficiency values above 7%. The yield of photovoltaic cells on planarized CMOS chips is 92%. This integration allows integrated energy harvesting using established process technologies and, as such, is an important step toward wireless autonomous microsystems (i.e., “smart dust”).
Original languageEnglish
Pages (from-to)2014-2021
Number of pages8
JournalIEEE Transactions on Electron Devices
Volume58
Issue number7
Publication statusPublished - 2011

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