Inhomogenities in PECVD deposited a-Si:H films induced by a spacing between substrate and substrate holder

W.G.J.H.M. van Sark, H. Meiling, J. Bezemer, M.B. von der Linden, R.E.I. Schropp, W. van der Weg

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	57
Number of pages	1
Journal	Solar Energy Materials and Solar Cells
Volume	45
Publication status	Published - 1997

Cite this

@article{40f430eb1f6a40a18763b61b34ee314d,

title = "Inhomogenities in PECVD deposited a-Si:H films induced by a spacing between substrate and substrate holder",

author = "{van Sark}, W.G.J.H.M. and H. Meiling and J. Bezemer and {von der Linden}, M.B. and R.E.I. Schropp and {van der Weg}, W.",

year = "1997",

language = "Undefined/Unknown",

volume = "45",

pages = "57",

journal = "Solar Energy Materials and Solar Cells",

issn = "0927-0248",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Inhomogenities in PECVD deposited a-Si:H films induced by a spacing between substrate and substrate holder

AU - van Sark, W.G.J.H.M.

AU - Meiling, H.

AU - Bezemer, J.

AU - von der Linden, M.B.

AU - Schropp, R.E.I.

AU - van der Weg, W.

PY - 1997

Y1 - 1997

M3 - Article

SN - 0927-0248

VL - 45

SP - 57

JO - Solar Energy Materials and Solar Cells

JF - Solar Energy Materials and Solar Cells

ER -