Inhomogeneities in PECVD deposited a-Si:H films induced by a spacing between substrate and substrate holder

W.G.J.H.M. van Sark, H. Meiling, J. Bezemer, M.B. von der Linden, R.E.I. Schropp, W. van der Weg

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Journal	Solar Energy Materials and Solar Cells
Publication status	Published - 1996

Cite this

@article{cdc9c4b2c006453bba586b198325bafb,

title = "Inhomogeneities in PECVD deposited a-Si:H films induced by a spacing between substrate and substrate holder",

author = "{van Sark}, W.G.J.H.M. and H. Meiling and J. Bezemer and {von der Linden}, M.B. and R.E.I. Schropp and {van der Weg}, W.",

year = "1996",

language = "Undefined/Unknown",

journal = "Solar Energy Materials and Solar Cells",

issn = "0927-0248",

publisher = "Elsevier",

}

TY - JOUR

T1 - Inhomogeneities in PECVD deposited a-Si:H films induced by a spacing between substrate and substrate holder

AU - van Sark, W.G.J.H.M.

AU - Meiling, H.

AU - Bezemer, J.

AU - von der Linden, M.B.

AU - Schropp, R.E.I.

AU - van der Weg, W.

PY - 1996

Y1 - 1996

M3 - Article

SN - 0927-0248

JO - Solar Energy Materials and Solar Cells

JF - Solar Energy Materials and Solar Cells

ER -