Abstract
The influence of electrochemical etching on the electroluminescence properties of n-type 6H- and 4H-SiC was investigated. Luminescence was generated by forward-biasing the semiconductor in an electrolyte solution containing a hole-injecting species. The emission properties of unetched, uniformly etched, and porous-etched substrates are compared. It is shown that the spectral distribution of the luminescence and the emission intensity strongly depends on photoanodic treatment.
| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | D49-D52 |
| Number of pages | 4 |
| Journal | Electrochemical and Solid-State Letters |
| Volume | 12 |
| Issue number | 6 |
| Publication status | Published - 2009 |
Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver