Influence of crucible material and source alloy composition on thermally evaporated indium tin oxide layers

  • H.R. Kerp
  • , M.W.M. van Cleef
  • , A.B. Wit
  • , R.E.I. Schropp
  • , R. Galloni
  • , P. Lazzeri

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined/Unknown
Pages (from-to)611-614
Number of pages4
JournalJournal of Vacuum Science & Technology A-Vacuum Surfaces and Films
Volume17
Issue number2
Publication statusPublished - 1999

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