Influence of crucible material and source alloy composition on thermally evaporated indium tin oxide layers

H.R. Kerp, M.W.M. van Cleef, A.B. Wit, R.E.I. Schropp, R. Galloni, P. Lazzeri

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	611-614
Number of pages	4
Journal	Journal of Vacuum Science & Technology A-Vacuum Surfaces and Films
Volume	17
Issue number	2
Publication status	Published - 1999

Cite this

@article{7f2c7d4667144478a3c0991c5989e029,

title = "Influence of crucible material and source alloy composition on thermally evaporated indium tin oxide layers",

author = "H.R. Kerp and {van Cleef}, M.W.M. and A.B. Wit and R.E.I. Schropp and R. Galloni and P. Lazzeri",

year = "1999",

language = "Undefined/Unknown",

volume = "17",

pages = "611--614",

journal = "Journal of Vacuum Science & Technology A-Vacuum Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Influence of crucible material and source alloy composition on thermally evaporated indium tin oxide layers

AU - Kerp, H.R.

AU - van Cleef, M.W.M.

AU - Wit, A.B.

AU - Schropp, R.E.I.

AU - Galloni, R.

AU - Lazzeri, P.

PY - 1999

Y1 - 1999

M3 - Article

SN - 0734-2101

VL - 17

SP - 611

EP - 614

JO - Journal of Vacuum Science & Technology A-Vacuum Surfaces and Films

JF - Journal of Vacuum Science & Technology A-Vacuum Surfaces and Films

IS - 2

ER -