Identification of Various Plasma Regimes in Very High Frequency PECVD of Amorphous and Nanocrystalline Silicon Near the Phase Transition

M.M. de Jong, J. de Koning, J.K. Rath, R.E.I. Schropp

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, 6-10 September 2010
Editors	G.F. de Santi, H. Ossenbrink, P. Helm
Place of Publication	Munich
Publisher	WIP-Renewable Energies
Pages	3149
Number of pages	1
Publication status	Published - 6 Sept 2010

25th European Photovoltaic Solar Energy Conference

Cite this

de Jong, M. M., de Koning, J., Rath, J. K., & Schropp, R. E. I. (2010). Identification of Various Plasma Regimes in Very High Frequency PECVD of Amorphous and Nanocrystalline Silicon Near the Phase Transition. In G. F. de Santi, H. Ossenbrink, & P. Helm (Eds.), Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, 6-10 September 2010 (pp. 3149). WIP-Renewable Energies.

de Jong, M.M. ; de Koning, J. ; Rath, J.K. et al. / Identification of Various Plasma Regimes in Very High Frequency PECVD of Amorphous and Nanocrystalline Silicon Near the Phase Transition. Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, 6-10 September 2010. editor / G.F. de Santi ; H. Ossenbrink ; P. Helm. Munich : WIP-Renewable Energies, 2010. pp. 3149

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title = "Identification of Various Plasma Regimes in Very High Frequency PECVD of Amorphous and Nanocrystalline Silicon Near the Phase Transition",

author = "{de Jong}, M.M. and {de Koning}, J. and J.K. Rath and R.E.I. Schropp",

note = "25th European Photovoltaic Solar Energy Conference",

year = "2010",

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de Jong, MM, de Koning, J, Rath, JK & Schropp, REI 2010, Identification of Various Plasma Regimes in Very High Frequency PECVD of Amorphous and Nanocrystalline Silicon Near the Phase Transition. in GF de Santi, H Ossenbrink & P Helm (eds), Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, 6-10 September 2010. WIP-Renewable Energies, Munich, pp. 3149.

Identification of Various Plasma Regimes in Very High Frequency PECVD of Amorphous and Nanocrystalline Silicon Near the Phase Transition. / de Jong, M.M.; de Koning, J.; Rath, J.K. et al.
Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, 6-10 September 2010. ed. / G.F. de Santi; H. Ossenbrink; P. Helm. Munich: WIP-Renewable Energies, 2010. p. 3149.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Identification of Various Plasma Regimes in Very High Frequency PECVD of Amorphous and Nanocrystalline Silicon Near the Phase Transition

AU - de Jong, M.M.

AU - de Koning, J.

AU - Rath, J.K.

AU - Schropp, R.E.I.

N1 - 25th European Photovoltaic Solar Energy Conference

PY - 2010/9/6

Y1 - 2010/9/6

M3 - Conference contribution

SP - 3149

BT - Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, 6-10 September 2010

A2 - de Santi, G.F.

A2 - Ossenbrink, H.

A2 - Helm, P.

PB - WIP-Renewable Energies

CY - Munich

ER -

de Jong MM, de Koning J, Rath JK, Schropp REI. Identification of Various Plasma Regimes in Very High Frequency PECVD of Amorphous and Nanocrystalline Silicon Near the Phase Transition. In de Santi GF, Ossenbrink H, Helm P, editors, Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, 6-10 September 2010. Munich: WIP-Renewable Energies. 2010. p. 3149