Hydrogenated amorphous silicon with high growth rate, gas utilisation, and homogeneous deposition by amplitude modulated VHF-PECVD for solar cell application

J.K. Rath; A.C.W. Biebericher; R. Jimenez Zambrano; R.E.I. Schropp; W. van der Weg; W.J. Goedheer

Hydrogenated amorphous silicon with high growth rate, gas utilisation, and homogeneous deposition by amplitude modulated VHF-PECVD for solar cell application

J.K. Rath, A.C.W. Biebericher, R. Jimenez Zambrano, R.E.I. Schropp, W. van der Weg, W.J. Goedheer

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	A6.6.
Journal	Materials Research Society symposia proceedings
Volume	715
Publication status	Published - 2002

Cite this

@article{750ded666236457d8536a05ebc8578d9,

title = "Hydrogenated amorphous silicon with high growth rate, gas utilisation, and homogeneous deposition by amplitude modulated VHF-PECVD for solar cell application",

author = "J.K. Rath and A.C.W. Biebericher and {Jimenez Zambrano}, R. and R.E.I. Schropp and {van der Weg}, W. and W.J. Goedheer",

year = "2002",

language = "Undefined/Unknown",

volume = "715",

pages = "A6.6.",

journal = "Materials Research Society symposia proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

}

Hydrogenated amorphous silicon with high growth rate, gas utilisation, and homogeneous deposition by amplitude modulated VHF-PECVD for solar cell application. / Rath, J.K.; Biebericher, A.C.W.; Jimenez Zambrano, R. et al.
In: Materials Research Society symposia proceedings, Vol. 715, 2002, p. A6.6.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Hydrogenated amorphous silicon with high growth rate, gas utilisation, and homogeneous deposition by amplitude modulated VHF-PECVD for solar cell application

AU - Rath, J.K.

AU - Biebericher, A.C.W.

AU - Jimenez Zambrano, R.

AU - Schropp, R.E.I.

AU - van der Weg, W.

AU - Goedheer, W.J.

PY - 2002

Y1 - 2002

M3 - Article

SN - 0272-9172

VL - 715

SP - A6.6.

JO - Materials Research Society symposia proceedings

JF - Materials Research Society symposia proceedings

ER -