Hydrogenated amorphous silicon with high growth rate, gas utilisation, and homogeneous deposition by amplitude modulated VHF-PECVD for solar cell application

J.K. Rath, A.C.W. Biebericher, R. Jimenez Zambrano, R.E.I. Schropp, W. van der Weg, W.J. Goedheer

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined/Unknown
Pages (from-to)A6.6.
JournalMaterials Research Society symposia proceedings
Publication statusPublished - 2002

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