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Hydrogenated amorphous and polycrystalline silicon TFT's by hot-wire CVD

  • H. Meiling
  • , A.M. Brockhoff
  • , J.K. Rath
  • , R.E.I. Schropp

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined/Unknown
Pages (from-to)1202-1206
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume227-230
Publication statusPublished - 1998

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