Hydrogenated amorphous and polycrystalline silicon TFT's by hot-wire CVD

H. Meiling, A.M. Brockhoff, J.K. Rath, R.E.I. Schropp

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1202-1206
Number of pages	5
Journal	Journal of Non-Crystalline Solids
Volume	227-230
Publication status	Published - 1998

Cite this

@article{994075385223416aba24bd0d91ce8cca,

title = "Hydrogenated amorphous and polycrystalline silicon TFT's by hot-wire CVD",

author = "H. Meiling and A.M. Brockhoff and J.K. Rath and R.E.I. Schropp",

year = "1998",

language = "Undefined/Unknown",

volume = "227-230",

pages = "1202--1206",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier",

}